Sensor test system

ABSTRACT

The sensor test system 1 includes a test apparatus group 20 including a plurality of sensor test apparatuses 30A to 30D coupled to each other so that the sensor 90 can be transferred, and each of the sensor test apparatuses 30A to 30D includes an application unit 40 including an application device 42 including a socket 445 to which the sensor 90 is electrically connected, and a pressure chamber 43 which applies a pressure to the sensor 90, a test unit 35 which tests the sensor 90 via the socket 445, and a conveying robot 33 which conveys the sensor 90 into and out of the application unit 40.

TECHNICAL FIELD

The present invention relates to a sensor test system which tests asensor.

The present application claims priority from Japanese Patent ApplicationNo. 2018-234116 filed on Dec. 14, 2018. The contents described and/orillustrated in the documents relevant to the Japanese Patent ApplicationNo. 2018-234116 will be incorporated herein by reference as a part ofthe description and/or drawings of the present application.

BACKGROUND ART

An evaluation device which evaluates a magneto-resistive effect elementwhile applying a magnetic field to the magneto-resistive effect elementand cooling the magneto-resistive effect element is known (for example,refer to Patent Document 1). The evaluation device includes a Peltierelement provided below a placing table on which the magneto-resistiveeffect element is placed, and the Peltier element cools themagneto-resistive effect element through the placing table.

CITATION LIST Patent Document

Patent Document 1: JP-A-11-339232

SUMMARY OF THE INVENTION Problem to be Solved by the Invention

In the above evaluation device, when the evaluation is performed under aplurality of conditions for the same magneto-resistance effect element,it is necessary to set the temperature of the placing table again everytime the temperature condition is changed, and therefore, there is aproblem that the throughput of the evaluation device is remarkablylowered.

The problem to be solved by the invention is to provide a sensor testsystem having excellent throughput.

Means for Solving Problem

[1] A sensor test system according to the present invention is a sensortest system which tests a sensor which detects a first physicalquantity, the sensor test system comprising a test apparatus groupincluding a plurality of sensor test apparatuses coupled to each otherso that the sensor can be transferred, and each of the sensor testapparatuses comprising: an application unit comprising at least oneapplication device including a socket to which the sensor iselectrically connected, and a first application part which applies thefirst physical quantity to the sensor; a test unit which tests thesensor via the socket; and a first conveying device which conveys thesensor into and out of the application unit.

[2] In the above invention, each of the sensor test apparatuses maycomprise an apparatus main body which houses the application unit, thetest unit and the first transport device, the apparatus main body mayhave a first opening through which the sensor is supplied to a firstposition in the sensor test apparatus, and a second opening throughwhich the sensor is discharged from a second position in the sensortesting apparatus, the sensor test apparatuses may include first andsecond sensor test apparatuses adjacent to each other, and the secondopening of the first sensor test apparatus and the first opening of thesecond sensor test apparatus may face each other.

[3] In the above invention, the test apparatus group may include asecond conveying device which moves the sensor from the second positionof the first sensor test apparatus to the first position of the secondsensor test apparatus, and the second conveying device may transfer thesensor from the first sensor test apparatus to the second sensor testapparatus through the second opening of the first sensor test apparatusand the first opening of the second sensor test apparatus.

[4] In the above invention, each of the sensor test apparatuses maycomprise a control unit which controls the application unit, the testunit and the first conveying device, and the control unit of one of thesensor test apparatuses may control the control units of the remainingsensor test apparatuses.

[5] In the above invention, the sensor test system may comprise ansupply device which supplies the untested sensor to the test apparatusgroup, and a discharge device which discharges the tested sensor fromthe test apparatus group.

[6] In the above invention, the first application part may be a pressureapplication part which applies a pressure to the sensor.

[7] In the above invention, the first application part may be adifferential pressure application part which applies two kinds ofpressures to the sensor.

[8] In the above invention, the first application part may be a magneticfield application part which applies a magnetic field to the sensor.

[9] In the above invention, the application device may include a secondapplication part which applies a second physical quantity different fromthe first physical quantity to the sensor, and the sensor testapparatuses may include: a sensor test apparatus which applies thesecond physical quantity of a first value to the sensor; and a sensortest apparatus which applies the second physical quantity of a secondvalue different from the first value to the sensor.

[10] In the above invention, the second application part may be atemperature adjustment part which applies a thermal stress to the sensorto adjust the temperature of the sensor.

[11] In the above invention, the application device may include a pusherwhich contacts the sensor and presses the sensor against the socket, andthe temperature adjustment part may be disposed in the pusher.

Effect of the Invention

In the present invention, a sensor test system includes a plurality ofsensor test apparatuses, and the sensor test apparatuses are coupled toeach other so that a sensor can be transferred. Therefore, since it ispossible to efficiently test a plurality of conditions for the samesensor, it is possible to provide a sensor test system excellent inthroughput.

BRIEF DESCRIPTION OF DRAWING(S)

FIG. 1 is a perspective view showing a sensor test system in anembodiment of the present invention.

FIG. 2(a) is a plan view showing a pressure sensor that is the testobject of the sensor test system in the embodiment of the presentinvention, and FIG. 2(b) is a plan view showing a modification of thepressure sensor that is the test object of the sensor test system in theembodiment of the present invention.

FIG. 3 is a diagram showing the internal layout of a loader in anembodiment of the present invention, and is a cross-sectional view takenalong the line in FIG. 1.

FIG. 4 is a diagram showing the internal layout of an unloader in anembodiment of the present invention, and is a cross-sectional view takenalong the IV-IV line of FIG. 1.

FIG. 5 is a perspective view showing a test cell in an embodiment of thepresent invention.

FIG. 6 is a diagram showing the internal layout of a test cell in anembodiment of the present invention, and is a cross-sectional view takenalong the VI-VI line of FIG. 1.

FIG. 7 is a front view showing a conveying robot in an embodiment of thepresent invention.

FIG. 8 is a plan view showing a conveying robot in an embodiment of thepresent invention.

FIG. 9 is a perspective view showing an application unit in anembodiment of the present invention.

FIG. 10 is a diagram showing an application unit in an embodiment of thepresent invention, and is a cross-sectional view taken along line X-X ofFIG. 9.

FIG. 11 is a cross-sectional view showing a pressure chamber in anembodiment of the present invention.

FIG. 12 is a plan view showing the base portion of the pressure chamberin the embodiment of the present invention, and is a view seen in theXII arrow direction of FIG. 11.

FIG. 13 is a block diagram showing a control system of a test cell in anembodiment of the present invention.

FIG. 14 is a perspective view showing the inside of the base of the testcell in the embodiment of the present invention.

FIG. 15 is a piping circuit diagram of a temperature adjustment unit inan embodiment of the present invention.

FIGS. 16 (a) to 16 (c) are cross-sectional views (No. 1 to No. 3)showing the operation of the application unit in the embodiment of thepresent invention.

FIGS. 17(a) to 17 (c) are cross-sectional views (No. 4 to No. 6) showingthe operation of the application unit in the embodiment of the presentinvention.

FIG. 18 is a cross-sectional view showing a pressure chamber in anembodiment of the present invention, and is an enlarged view of theXVIII portion of FIG. 17 (c).

FIG. 19 is a block diagram showing a control system of the sensor testsystem in an embodiment of the present invention.

FIG. 20 is a diagram showing a first modification of the applicationdevice in an embodiment of the present invention, and is across-sectional view of the application device for the differentialpressure sensor.

FIG. 21 is a diagram showing a second modification of the applicationdevice in an embodiment of the present invention, and is across-sectional view of the application device for a magnetic sensor.

MODE(S) FOR CARRYING OUT THE INVENTION

Hereinafter, an embodiment of the present invention will be describedwith reference to the drawings.

FIG. 1 is a perspective view showing a sensor test line in the presentembodiment, FIG. 2(a) is a plan view showing a pressure sensor that isthe test object of the sensor test system in the present embodiment, andFIG. 2(b) is a plan view showing a modification of the pressure sensorthat is the test object of the sensor test system in the presentembodiment.

As shown in FIG. 1, the sensor test system 1 in the present embodimentis a sensor test line including a test apparatus group 20 configured bycoupling (connecting) a plurality of (four in this example) test cells30 (30A to 30D) for testing a sensor 90. The test cell 30 in the presentembodiment corresponds to an example of the “sensor test apparatus” inthe present invention. The number of the test cells 30 constituting thetest apparatus group 20 is not particularly limited, and can be set inaccordance with the number of types of tests performed by the sensortest system 1 and the like.

The sensor 90 which is a test object of the sensor test system 1 is apressure sensor that detects (measures) pressure and outputs anelectrical signal according to the detection result (measurementresult). As shown in FIG. 2 (a), the sensor 90 is a sensor device of atype in which an individualized sensor chip (die) 902 is mounted on awiring board 901. Contactors of a socket 445 of the later describedapplication unit 40 contact terminals 903 provided on the wiring board901.

As shown in FIG. 2(b), the sensor 90′ which is a test object of thesensor test system 1 may be a sensor device of a type in which a wiringboard 901 on which a sensor chip 902 is mounted is packaged with a resinmaterial and leads 905 protrude from the package 904. In this case, thecontactors of socket 445 contact the leads 905.

The test object of the sensor test system 1 may be a sensor other than apressure sensor. For example, a differential pressure sensor or amagnetic sensor may be a test object of the sensor test system 1.Alternatively, a sensor for detecting a physical quantity other thanpressure or magnetism may be a test object of the sensor test system 1.

Each of the test cells 30 is a device that determines whether or not thesensor 90 is defective on the basis of an electric signal output fromthe sensor 90 in a state where the temperature of the sensor 90 isadjusted to a predetermined temperature and a predetermined pressure isapplied to the sensor 90. Although not particularly limited, in thesensor test system 1, it is possible to perform multiple type of tests(four types in this example) with respect to one sensor 90 by passingthe sensor 90 through a plurality of test cells 30A to 30D.

As shown in FIG. 1, the sensor test system 1 includes a loader 10 thatcarries an untested sensor 90 into the test apparatus group 20, and anunloader 80 that carries the tested sensor 90 out of the test apparatusgroup 20, and can automatically carry the sensor 90 into/out of the testapparatus group 20. The loader 10 in the present embodiment correspondsto an example of the “supply device” in the present invention, and theunloader 80 in the present embodiment corresponds to an example of the“discharge device” in the present invention.

FIG. 3 is a diagram showing an internal layout of the loader in thepresent embodiment, and is a cross-sectional view taken along the lineof FIG. 1.

The loader 10 in the present embodiment is a loading device for carryingan untested sensor 90 into the test apparatus group 20, and is coupled(connected) to a test cell 30A located at the leading end (left end inFIG. 1) of the test apparatus group 20. As shown in FIG. 3, the loader10 includes a transfer device 11 and a moving device 12. In the loader10, the transfer device 11 and the moving device 12 are controlled by acontrol unit 15 (refer to FIG. 19).

The transfer device 11 is a pick-and-place device that conveys thesensor 90, and includes an suction head 111 that can hold the sensor 90by suction and can move up and down in the Z direction, and a rail 112that moves the suction head 111 on the XY plane. The moving device 12includes a rail 121 provided along the X direction, and a plate 122reciprocally movable on the rail 121. A plurality of concaveaccommodating portions 123 capable of accommodating the sensors 90 areformed on the upper surface of the plate 122.

A part of the moving device 12 and the transfer device 11 areaccommodated in a cover 13 of the loader 10, and two openings 13 a and13 b are formed in the cover 13. The remainder of the moving device 12extends into the test cell 30A through one opening 13 b.

The tray 14 is carried into the lower side of the transfer device 11through the other opening 13 a. Transfer device 11 picks up the sensor90 from this tray 14 and places it in the accommodation portion 123 ofthe plate 122 located in the loader 10. The moving device 12 moves theplate 122 into the test cell 30A through the opening 13 b, and carriesthe untested sensor 90 into the test cell 30A.

The configuration of the loader 10 is not particularly limited to theabove-described configuration. For example, instead of thepick-and-place device, an articulated robot arm may be used as thetransfer device 11. Alternatively, a parts feeder may be used instead ofthe transfer device 11. The plurality of trays 14 may be carried intothe loader 10 in a state of being accommodated in a magazine.

FIG. 4 is a diagram showing an internal layout of the unloader in thepresent embodiment, and is a cross-sectional view taken along the Iv-Ivline of FIG. 1.

The unloader 80 in the present embodiment is a discharge device fordischarging the tested sensor 90 from the test apparatus group 20, andis coupled (connected) to the test cell 30D located at the rear end(right end in FIG. 1) of the test apparatus group 20. As shown in FIG.4, the unloader 80 includes a moving device 81 and a transfer device 82.In the unloader 80, the moving device 81 and the transfer device 82 arecontrolled by a control unit 85 (refer to FIG. 19).

The moving device 81 is the same device as the moving device 12 of theloader 10 described above, and includes a rail 811 and a plate 812, anda plurality of accommodation portions 813 are formed on the uppersurface of the plate 812. The transfer device 82 is the same device asthe transfer device 11 of the loader 10 described above, and is apick-and-place device including a suction head 821 and a rail 822.

A part of the moving device 81 and the transfer device 82 areaccommodated in a cover 83 of the unloader 80, and two openings 83 a and83 b are formed in the cover 83. The remainder of the transfer device 81extends into the test cell 30D through one opening 83 a.

The moving device 81 moves the plate 812 from the test cell 30D into theunloader 80 and ejects the tested sensor 90 from the test cell 30D.Then, the transfer device 82 picks up the sensor 90 from the plate 812located in the unloader 80, and places it on the trays 84 located belowthe transfer device 82. At this time, the transfer device 82 may placethe sensor 90 on the tray 84 while classifying the sensors 90 on thebasis of the test results of the respective test cells 30. The tray 84is carried out of the unloader 80 through the other opening 83 b of thecover 83.

The configuration of the unloader 80 is not particularly limited to theabove-described configuration. For example, an articulated robot arm maybe used as the transfer device 82 instead of the pick-and-place device.Alternatively, a parts feeder may be used instead of the transfer device82. The plurality of trays 84 may be carried out of the unloader 80 in astate of being accommodated in a magazine.

FIG. 5 is a perspective view showing a test cell in the presentembodiment, FIG. 6 is a view showing a layout inside the test cell inthe present embodiment, and FIGS. 7 and 8 are a front view and a planview showing a conveying robot in the present embodiment.

The test apparatus group 20 in the present embodiment includes aplurality of test cells 30 that respectively execute a test of thesensor 90, and a moving device 70 that transfers the sensor 90 betweenmutually adjacent test cells 30.

As shown in FIG. 6, the moving device 70 is the same device as themoving device 12 of the loader 10 described above, and includes a rail71 and a plate 72, and a plurality of accommodating portions 73 areformed on the upper surface of the plate 72. The moving device 70comprises a control unit 75 (see FIG. 19) for controlling the movingoperation of the plates 72. The moving device 70 in the presentembodiment corresponds to an example of the “second conveying device” inthe present embodiment.

As shown in FIGS. 5 and 6, each test cell 30 includes a preheat part 31,a plurality of (two in this example) application units 40, a heatremoval part 32, and a conveying robot 33. Since the test cell 30includes a plurality of application units 40, throughput in the testcell 30 can be improved.

The number of application units 40 included in the test cell 30 is notparticularly limited, and the test cell 30 may include only oneapplication unit 40, or may include three or more application units 40.The test cell 30 may not include the preheat part 31 and the heatremoval part 32.

The test cell 30 includes an apparatus main body 301 that accommodates apreheat part 31, application units 40, a heat removal part 32 and theconveying robot 33. The apparatus main body 301 includes a base 302 anda cover 305.

The base 302 includes a frame 303 and a base plate 304 supported by theframe 303. The base 302 has a concave portion 302 a recessed in the +Ydirection in plan view, and has a substantially U-shaped planar shape.The base 302 has an opening 302 b formed by the recess 302 a, and theopening 302 b opens in the −Y direction.

The cover 305 is provided on the base 302 and has a substantially cubicshape including the entire surface of the base plate 304 including theconcave portion 302 a. Openings 307 a and 307 b are formed in the Xdirection side surfaces 306 a and 306 b of the cover 305 respectively.An opening 307 c is formed in the −Y direction side surface 306 c of thecover 305. The opening 307 c is located above the opening 302 b of thebase 302, and the openings 302 b and 307 c substantially coincide witheach other in the Z direction. The opening 307 a in the presentembodiment corresponds to an example of the “first opening” in thepresent invention, and the opening 307 b in the present embodimentcorresponds to an example of the “second opening” in the presentinvention.

The preheat part 31, the application units 40, and the heat removal part32 are provided on the base plate 304 of the base 302, and are disposedin the apparatus main body 301. The conveying robot 33 also enters theconcave portion 302 a of the base 302 via the openings 302 b and 307 cof the apparatus main body 301, and is disposed in the apparatus mainbody 301. The conveying robot 33 can be moved into and out of theapparatus main body 301 through the openings 302 b and 307 c, and thetest cell 30 is excellent in the maintainability.

The test cell 30A at the leading end (left end in FIG. 1) of the testapparatus group 20 is coupled (connected) to the loader 10 so that theopening 13 b of the loader 10 and the opening 307 a of the test cell 30Aface each other. The moving device 12 of the loader 10 enters the testcell 30A through the opening 13 b of the loader 10 and the opening 307 aof the test cell 30A. The sensor 90 is supplied to the test cell 30A bythe moving device 12.

The intermediate test cell 30B in the test apparatus group 20 is coupled(connected) to the test cell 30A so that the opening 307 b of the testcell 30A and the opening 307 a of the test cell 30B face each other. Apart of the moving device 70 is positioned on the base plate 304 of thetest cell 30A, and the remainder of the moving device 70 extends towardthe rear end side test cell 30B through the opening 307 b of the testcell 30A and the opening 307 a of the test cell 30B, and enters the testcell 30B. The moving device 70 is bridged between the test cell 30A andthe test cell 30B, and the moving device 70 transfers the sensor 90between the test cell 30A and the test cell 30B.

The intermediate test cell 30C in the test apparatus group 20 isconnected (coupled) to the test cell 30B so that the opening 307 b ofthe test cell 30B and the opening 307 a of the test cell 30C face eachother. A part of the moving device 70 is positioned on the base plate304 of the test cell 30B, and the remainder of the moving device 70extends toward the rear end side test cell 30C through the opening 307 bof the test cell 30B and the opening 307 a of the test cell 30C, andenters the test cell 30C. The moving device 70 is bridged between thetest cell 30B and the test cell 30C, and the moving device 70 transfersthe sensor 90 between the test cell 30B and the test cell 30C.

The test cell 30D at the rear end (right end in FIG. 1) of the testapparatus group 20 is coupled (connected) to the test cell 30C so thatthe opening 307 b of the test cell 30C and the opening 307 a of the testcell 30D face each other. A part of the moving device 70 is positionedon the base plate 304 of the test cell 30C, and the remainder of themoving device 70 extends toward the rear end side test cell 30D throughthe opening 307 b of the test cell 30C and the opening 307 a of the testcell 30D, and enters the test cell 30D. The moving device 70 is bridgedbetween the test cell 30C and the test cell 30D, and the moving device70 transfers the sensor 90 between the test cell 30C and the test cell30D.

The test cell 30D is coupled (connected) to the unloader 80 so that theopening 307 b of the test cell 30D and the opening 83 a of the unloader80 face each other. The moving device 81 protruding from the unloader 80enters the test cell 30D through the opening 307 b of the test cell 30Dand the opening 83 a of the unloader 80. The sensor 90 is dischargedfrom the test cell 30D by the moving device 81.

Regarding the test cell 30A, a part of the moving device 12 located onthe base plate 304 of the test cell 30A corresponds to an example of the“first position” in the present embodiment. The portion of the movingdevice 70 located on the base plate 304 of the test cell 30A correspondsto an example of the “second position” in the present invention.

Regarding the test cell 30B, a part of the leading end side movingdevice 70 located on the base plate 304 of the test cell 30B correspondsto an example of the “first position” in the present embodiment. Thepart of the rear end side moving device 70 is located on the base board304 of the test cell 30B corresponds to an example of the “secondposition” in the present invention.

Regarding the test cell 30C, a part of the leading end side movingdevice 70 located on the base plate 304 of the test cell 30C correspondsto an example of the “first position” in the present embodiment. Thepart of the rear end side moving device 70 is located on the base board304 of the test cell 30C corresponds to an example of the “secondposition” in the present invention.

Regarding the test cell 30D, the part of the moving device 70 located onthe base plate 304 of the test cell 30D corresponds to an example of the“first position” in the present invention embodiment. The portion of themoving device 81 located on the base plate 304 of the test cell 30Dcorresponds to an example of the “second position” in the presentinvention.

In plan view, the moving device 12 (moving device 70), the preheat part31, the application units 40, the heat removal part 32, and the movingdevice 70 (moving device 81) are arranged in a substantially U-shape soas to surround the conveying robot 33.

More specifically, the preheat part 31 is disposed between the movingdevice 12 (moving device 70) that is in the apparatus main body 301 andthe application unit 40. The heat removal part 32 is disposed betweenthe application unit 40 and the moving device 70 (moving device 81) thatis in the test cell 30. The leading end side moving device 12 (movingdevice 70) and the rear end side moving device 70 (moving device 81)face each other via the concave portion 302 a of the base 302.Similarly, the preheat part 31 and the heat removal part 32 also faceeach other via the concave portion 302 a. By employing such asubstantially U-shaped layout, space saving of the test cell 30 can beachieved.

The layout in the apparatus main body 301 is not limited to asubstantially U-shape. For example, the moving device 12 (moving device70), the preheat part 31, the application units 40, the heat removalpart 32, and the moving device 70 (moving device 81) may be arrangedlinearly in the apparatus main body 301.

The preheat part 31 includes a plate 311 having a plurality of recessedaccommodation portions 312 capable of accommodating the sensors 90respectively. The plate 311 is connected to a heating/cooling device(not shown), and the temperature of the sensor 90 before being suppliedto the application unit 40 can be brought close to a predeterminedtemperature in advance. Thereby, it possible to shorten the timerequired for the temperature of the sensor 90 to reach the predeterminedtemperature in the application unit 40.

The heat removal part 32 also includes a plate 321 having a plurality ofrecessed accommodation portions 322 capable of accommodating the sensors90. The plate 321 is connected to a heating/cooling device (not shown),and the temperature of the sensor 90 after being discharged from theapplication unit 40 can be brought close to a normal temperature.Thereby, it possible to shorten the heat removal period of the sensor 90after the test in the application unit 40, and to restrain condensationfrom occurring on the sensor 90 after the test.

The configuration of the preheat part 31 is not particularly limited tothe above. For example, the preheat part 31 may blow warm air or coldair to the untested sensor 90 to heat/cool the sensor 90. Similarly, theconfiguration of the heat removal part 32 is not particularly limited tothe above. For example, the heat removal part 32 may blow warm air orcold air to the tested sensor 90 to heat/cool the sensor 90.

As shown in FIGS. 7 and 8, the conveying robot 33 is a double-armedscalar robot having two articulated arms 332 and 336. The conveyingrobot 33 carries the untested sensor 90 into the application unit 40,and carries the tested sensor 90 out of the application unit 40. Theconveying robot 33 in the present embodiment corresponds to an exampleof the “first conveying device” in the present invention.

The conveying robot 33 includes a base portion 331, a first articulatedarm 332, and a second articulated arm 336. The first and secondarticulated arms 332 and 336 are supported by the base portion 331, andare rotatable about the first rotation shaft RA₁. That is, the first andsecond articulated arms 332 and 336 share the first rotation shaft RA₁.

The first articulated arm 332 includes a first arm 333, a second arm334, and a first suction head 335. The first arm 333 is supported by thebase portion 331 and is rotatable about the first rotation shaft RA₁ asdescribed above. The second arm 334 is supported by the first arm 333and is rotatable about the second rotation shaft RA₂. The first suctionhead 335 is supported by the second arm 334 and is rotatable about thethird rotation shaft RA₃. The first suction head 335 is held by thesecond arm 334 so as to be able to move up and down in the Z direction,and has a suction pad capable of holding the sensor 90 by suction.

Similarly to the first articulated arm 331, the second articulated arm336 also includes a third arm 337, a fourth arm 338, and a secondsuction head 339. The third arm 337 is supported by the base portion 331and is rotatable about the first rotation shaft RA₁ as described above.The fourth arm 338 is supported by the third arm 337 and is rotatableabout the fourth rotation shaft RA₄. The second suction head 339 issupported by the fourth arm 338 and is rotatable about the fifthrotation shaft RA₅. The second suction head 339 is held by the fourtharm 338 so as to be able to move up and down in the Z direction, and hasa suction pad capable of holding the sensor 90 by suction.

In the present embodiment, space saving of the test cell 30 can beachieved by using such a double-armed scalar robot as the conveyingrobot 33. The configuration of the first and second articulated arms 331and 336 (e.g., the degree of freedom and the length of each arm) is notparticularly limited to the above. The configuration of the firstarticulated arm 331 and the configuration of the second articulated arm336 may be different from each other. Alternatively, another type ofrobot other than the double-armed scalar robot may be used as theconveying robot 33. Alternatively, instead of the conveying robot 33,another conveying device such as a pick-and-place device may be used.

As shown in FIGS. 5 and 6, when an untested sensor 90 is carried intothe test cell 30 by the moving device 12 (moving device 70) from theloader 10 (previous test cell 30), the conveying robot 33 moves thesensor 90 from the moving device 12 (moving device 70) to the preheatpart 31, and further moves the sensor 90 from the preheat part 31 to theapplication unit 40. When the test of the sensor 90 is completed in theapplication unit 40, the conveying robot 33 moves the tested sensor 90from the application unit 40 to the heat removal part 32, and furthermoves the sensor 90 from the heat removal part 32 to the moving device70 (moving device 81). The moving device 70 (moving device 81) moves thesensor 90 to the next test cell 30 (unloader 80).

At this time, in the present embodiment, the first articulated arm 332of the conveying robot 33 is in charge of supplying the sensor 90 to theapplication unit 40. On the other hand, the second articulated arm 336is in charge of discharging the sensor 90 from the application unit 40.

Specifically, the first articulated arm 332 is in charge of the movementfrom the moving device 12 (moving device 70) to the preheat part 31 andthe movement from the preheat part 31 to the application unit 40. On theother hand, the second articulated arm 336 is in charge of the movementfrom the application unit 40 to the heat removal part 32 and themovement from the heat removal part 32 to the moving device 70 (movingdevice 81). The first articulated arm 332 supplies the untested sensor90 to both application units 40, and the second articulated arm 336discharges the tested sensor 90 from both application units 40.

FIGS. 9 and 10 are a perspective view and a cross-sectional view showingan application unit in the present embodiment, FIG. 11 is across-sectional view showing a pressure chamber in the presentembodiment, and FIG. 12 is a plan view showing a base portion of thepressure chamber in the present embodiment.

As shown in FIGS. 9 and 10, the application unit 40 includes a drychamber 41 and a plurality of (four in this example) application devices42. In the present embodiment, the two application units 40 included inthe respective test cells 30 have the same structure, but the presentinvention is not particularly limited thereto.

In the present embodiment, four application devices 42 are accommodatedin the dry chamber 41, and one application device 42 corresponds to onesensor 90. Therefore, in the application unit 40 of the presentembodiment, it is possible to simultaneously test the four sensors 90.The number of the application devices 42 included in the applicationunit 40 is not particularly limited, and can be arbitrarily determinedin accordance with the throughput and the like required for the testcell 20.

The dry chamber 41 includes a box-shaped housing 411 having an opening411 a, and a lid 412 covering the opening 441 a. Dry air having a lowdew point temperature is filled in the dry chamber 41 to suppress theoccurrence of condensation on the sensor 90.

Four windows 412 a are formed in the lid 412 so as to correspond to thefour application devices 42, respectively. Four shutters 413 is providedin the lid 412 so as to correspond to the four windows 412 a. Theshutter 413 is reciprocally movable in the Y direction by the actuator414, and the window 412 a of the lid 412 is opened and closed by theshutter 413 when the sensor 90 is carried in and out of the applicationunit 40. As a specific example of the actuator 414, for example, an aircylinder can be exemplified.

The configuration of the application unit is not particularly limited tothe above. For example, the application unit may not comprise a drychamber. In this case, the application unit may be configured by simplyproviding a plurality of application devices 42 on one support plate401.

Each of the application devices 42 is a unit that applies a thermalstress to the sensor 90 supplied by the conveying robot 33 and applies apressure to the sensor 90. The application device 42 includes a pressurechamber 43 and a pressing mechanism 48. In the present embodiment, thefour application devices 42 included in the respective application units40 have the same structure, but the present invention is notparticularly limited thereto.

As shown in FIGS. 11 and 12, the pressure chamber 43 has a base portion44 and a head portion 45. The base portion 44 is fixed to the bottomsurface of the housing 411 so as to face the window 412 a of the lid 412of the dry chamber 41. A circular concave portion 441 is opened on theupper surface of the base portion 44, and an O-ring 442 is provided soas to surround the opening of the concave portion 441. A pipe 444 a isconnected to a side surface of the base portion 44. The pipe 444 acommunicates with the inside of the concave portion 441 and is connectedto the pressure adjustment unit 36 (to be described later).

A socket 445 is provided at the center of the inside of the concaveportion 441. Although not shown in particular, the socket 445 hascontactors that contact the terminals 903 of the sensor 90. Examples ofsuch contactors include pogo pins, anisotropic conductive rubber, andthe like. A cable 446 is connected to a side surface of the base portion44. The socket 445 is electrically connected to the test unit 35 (to bedescribed later) via the cable 446.

A heat sink 443 is formed inside the base portion 44. Although not shownin particular, the heat sink 443 has a bellows-shaped flow path formedinside the base portion 44, fins protruding from the inner wall of thebase portion 44, or the like, and can efficiently exchange heat with therefrigerant/hot medium supplied from the temperature adjusting unit 37(to be described later).

The heat sink 443 is provided directly below the socket 445, and canheat/cool the sensor 90 through the socket 445. Pipes 444 b to 444 d areconnected to the side surface of the base portion 44. These pipes 444 bto 444 d communicate with the heat sink 443 and are connected to thetemperature adjustment unit 37.

The head portion 45 of the pressure chamber 43 includes a pusher 46 anda holding plate 47. As shown in FIG. 10, the head portion 45 is providedin the dry chamber 41 so as to be reciprocally movable in the Ydirection by an actuator 472 (to be described later), and canreciprocate between a position above the base portion 44 (refer to FIG.17(b)) and a position retreated from above the base portion 44 (see FIG.16(a)).

As shown in FIG. 11, the pusher 46 has a convex portion 461 protrudingdownward, and the convex portion 461 contacts the sensor 90 to press thesensor 90 against the socket 445.

A heat sink 462 is provided inside the pusher 46. Similarly to the heatsink 443 of the base portion 44 described above, the heat sink 462 has abellows-shaped flow path formed inside the pusher 46, fins protrudingfrom the inner wall of the pusher 46, or the like, and can efficientlyexchange heat with the refrigerant/hot medium supplied from thetemperature adjustment unit 37.

The heat sink 462 is formed also inside the convex portion 461, and canheat/cool the sensor 90. Pipes 463 a to 463 c are connected to the sidesurface of the head portion 45. These pipes 463 a to 463 c communicatewith the heat sink 462 and are connected to the temperature adjustingdevice 37.

In the present embodiment, both the base portion 44 and the head portion45 have the heat sinks 443 and 462, but this is not particularlylimited. For example, one of the base portion 44 or the head portion 45may have a heat sink, and the other of the head portion 45 or the baseportion 44 may have a temperature adjustment means other than the heatsink. As an example of the temperature adjusting means other than theheat sink, for example, a heater, a Peltier element, or the like can beexemplified. Alternatively, only one of the base portion 44 or the headportion 45 may have a temperature adjusting means, and the other of thehead portion 45 or the base portion 44 may not have a temperatureadjusting means.

A pair of cam followers 464 are rotatably mounted on the upper portionof the pusher 46. As the cam follower 464 rolls along the cam groove 482of the pressing mechanism 48 (to be described later), the pusher 46 islowered.

Further, the pusher 46 is inserted into an opening 471 of the holdingplate 47, and is movably held by the holding plate 47 via a stopper 465and a coil spring 466. The stopper 465 is inserted into the through holeof the holding plate 47 and fixed to the pusher 46. The coil spring 466is interposed between the stopper 465 and the holding plate 47 in acompressed state, and the pusher 46 is urged upward by the coil spring466.

As shown in FIG. 10, an actuator 472 fixed to the dry chamber 41 isconnected to the holding plate 47. The actuator 472 allows the headportion 45 to reciprocate in the Y direction. As a specific example ofthe actuator 472, for example, an air cylinder can be exemplified.

The pressing mechanism 48 is provided in the dry chamber 41 so as toface the head portion 45 with the base portion 44 interposedtherebetween. The pressing mechanism 48 includes a cam plate 481 and anactuator 484.

A cam groove 482 into which the cam follower 464 of the pusher 46 isinserted is formed in the cam plate 481. As the cam follower 464 rollsalong the inclined surface 483 of the cam groove 482, the pusher 46descends relative to the holding plate 47.

An actuator 484 fixed to the dry chamber 41 is connected to the camplate 481. The actuator 484 allows the cam plate 481 to reciprocate inthe Y direction. As a specific example of the actuator 484, for example,an air cylinder can be exemplified.

The pressure chamber 43 in the present embodiment corresponds to anexample of the “pressure application part” in the present invention, andthe heat sink 462 formed in the head portion 45 in the presentembodiment corresponds to an example of the “temperature adjustmentpart” in the present invention.

The configuration of the application device is not particularly limitedto the above configuration as long as the application device includes asocket to which the sensor is electrically connected, a mechanism forapplying a thermal stress to the sensor, and a mechanism for applyingpressure to the sensor.

The configuration of the moving mechanism for moving the pusher 46relative to the socket 445 is not particularly limited to the above. Forexample, instead of the actuator 472 and the pressing mechanism 48, aball screw and a motor may be used to configure the moving mechanism.Alternatively, a pick-and-place device, a robot having an articulatedarm, or the like may be used as a moving mechanism.

FIG. 13 is a block diagram showing the control system of the test cellin the present embodiment, FIG. 14 is a perspective view showing theinside of the base of the test cell in the present embodiment, and FIG.15 is a piping circuit diagram of the temperature adjustment unit in thepresent embodiment.

As shown in FIG. 13, each test cell 30 includes a control unit 34, atest unit 35, a pressure adjustment unit 36, and a temperatureadjustment unit 37.

As shown in FIG. 14, the control unit 34, the test unit 35, the pressureadjustment unit 36, and the temperature adjustment unit 37 are installedinside a frame 303 of a base 302 of an apparatus main body 301. In thepresent embodiment, the test unit 35 is disposed directly under theapplication unit 40 from the viewpoint of improving the test accuracy,but the present invention is not particularly limited thereto. Forexample, the pressure adjustment unit 36 may be arranged directly belowthe application unit 40, or the temperature adjustment unit 37 may bearranged directly below the application unit 40.

The control unit 34 includes, for example, a computer, and manages thecontrols in the test cell 30. Specifically, as shown in FIG. 13, thecontrol unit 34 controls the test unit 35, the pressure adjustment unit36 and the temperature adjustment unit 37, and also controls theabove-described conveying robot 33 and the actuators 472 and 484 of theapplication unit 40.

The test unit 35 includes, for example, a computer, a circuit board fortesting, or the like, and is electrically connected to a socket 445provided in each pressure chamber 43 of the application unit 40. Thetest unit 35 supplies electric power to the sensor 90 and acquires anelectric signal output from the sensor 90 in a state where apredetermined pressure is applied to the sensor 90 by the pressurechamber 43, and determines whether the sensor 90 is a non-defectiveproduct or a defective product on the basis of the electric signal. Thetest unit 35 may acquire the characteristic of the output of the sensor90 with respect to the actually applied pressure value on the basis ofthe electric signal output from the sensor 90.

The pressure adjustment unit 36 is connected to the concave portion 441of the base portion 44 via the pipe 444 a described above. The pressureadjustment unit 36 includes, for example, a pressurizing device, adepressurizing device, and a pressure controller. The pressurizingdevice pressurizes the atmosphere in the sealed space 431 by supplyingcompressed air into the sealed space 431 (to be described later) of thepressure chamber 43. The depressurizing device is a device fordepressurizing the atmosphere in the sealed space 431, and as a specificexample, an ejector or a vacuum pump can be exemplified. The pressurecontroller is provided between the pressurizing device and the sealedspace 431 and between the depressurizing device and the sealed space431, is a device for adjusting the pressurizing amount by thepressurizing device and the depressurizing amount by the depressurizingdevice, and includes, for example, a regulator. Although notparticularly limited, the pressure adjustment unit 36 can regulate thepressure in the pressure chamber 43 in the range of −60 kPa to 800 kPa.

The temperature adjustment unit 37 is a unit for supplying a refrigerantand a hot medium to the heat sinks 443 and 462 of the respectivepressure chambers 43 of the application unit 40 in order to adjust thetemperature of the sensor 90. The temperature adjustment unit 37 iscapable of adjusting the temperature of the sensor 90 through the heatsinks 443 and 462 in the range of −40° C. to +150° C. As shown in FIG.15, the temperature adjustment unit 37 has a heat exchangers 371 and372, a refrigerant container 373, a hot medium container 374, a pump375, flow paths 376 a to 376 c, and a value 377 a to 377 d.

The heat exchanger 371 has a flow path connected to the refrigerantcontainer 373 and a flow path connected to the heat sinks 443 and 462,and cools the refrigerant to be supplied to the heat sinks 443 and 462by heat exchange between the flow paths. The heat exchanger 371 and thevalves 377 a and 377 c are connected via a flow path 376 a.

The heat exchanger 372 also has a flow path connected to the hot mediumcontainer 374 and a flow path connected to the heat sinks 443 and 462,and heats the hot medium to be supplied to the heat sinks 443 and 462 byheat exchange between the flow paths. The heat exchanger 372 and thevalves 377 b and 377 d are connected via a flow path 376 b.

The temperature adjustment unit 37 adjusts the flow rate of therefrigerant by the valve 377 a and adjusts the flow rate of the hotmedium by the valve 377 b. The refrigerant and the hot medium whose flowrates are adjusted are supplied to the heat sink 443 via the pipes 444 band 444 c and mixed in the heat sink 443. At this time, by changing themixing ratio of the refrigerant and the hot medium by the valves 377 aand 377 b, it is possible to adjust the temperature of the mixed liquidin the heat sink 443. The heat of the mixed liquid in the heat sink 443is transferred to the sensor 90 via the socket 445, thereby thetemperature of the sensor 90 is adjusted.

Similarly, the temperature adjustment unit 37 adjusts the flow rate ofthe refrigerant by the valve 377 c and adjusts the flow rate of the hotmedium by the valve 377 d. The refrigerant and the hot medium whose flowrates are adjusted are supplied to the heat sink 462 via the pipes 463 aand 463 b, and the refrigerant and the hot medium are mixed in the heatsink 462. At this time, by changing the mixing ratio of the refrigerantand the hot medium by the valves 377 c and 377 d, it is possible toadjust the temperature of the mixed liquid in the heat sink 462. Theheat of the mixed liquid in the heat sink 462 is transferred to thesensor 90 via the convex portion 461 of the pusher 6, thereby thetemperature of the sensor 90 is adjusted.

The heat sink 443 is connected to the flow path 376 c via a pipe 444 d.The heat sink 462 is also connected to the flow path 376 c via a pipe463 c. The mixed liquid discharged from the heat sinks 443 and 462returns to the heat exchangers 371 and 372 via the flow path 376 c. Thepump 375 is provided in the flow path 376 c and pumps the mixed liquid.

In the present embodiment, the refrigerant and the hot medium aresupplied to all (a total of 8) heat sinks 443 and 462 of the applicationunit 40 by one temperature adjustment unit 37, but this is notparticularly limited. For example, the test cell may include the fourtemperature adjustment units, and one temperature adjustment unit may beconfigured to supply the refrigerant and the hot medium to the heatsinks 443 and 462 of one application device 42. Alternatively, the testcell may include two temperature adjustment units, and the refrigerantand the hot medium may be supplied to the four heat sinks 443 by onetemperature adjustment unit, and the refrigerant and the hot medium maybe supplied to the four heat sinks 462 by the other temperatureadjustment unit.

Hereinafter, the operation of the application unit 40 will be describedwith reference to FIGS. 16(a) to 18. FIGS. 16(a) to 17(c) arecross-sectional views (No. 1 to No. 6) showing the operation of theapplication unit in the present embodiment, and FIG. 18 is an enlargedview of the XVIII portion in FIG. 17(c).

First, the first suction hand 335 (second suction hand 339) of theconveying robot 33 holding the untested sensor 90 is moved above thewindow 412 a of the lid 412, and the shutter 413 of the dry chamber 41is moved to open the window 412 a (refer to FIG. 16(a)).

Next, the first suction head 335 (second suction hand 339) of theconveying robot 33 is lowered, and the sensor 90 is placed on the socket445 provided in the base portion 44 (refer to FIG. 16(b)). In thisstate, the head portion 45 is retreated from above the base portion 44.

Next, the first suction head 335 (second suction hand 339) of theconveying robot 34 is raised and retreated from the application unit 40(refer to FIG. 16(c)). Next, the shutter 413 of the dry chamber 41 ismoved to close the window 412 a (see FIG. 17(a)).

Next, the head portion 45 is moved above the base portion 44 by drivingthe actuator 472 (refer to FIG. 17(b)). Next, the actuator 484 of thepressing mechanism 48 is driven to move the cam plate 481 toward thehead portion 45 (refer to FIG. 17(c)). As a result, the cam follower 464of the pusher 46 rolls along the cam groove 482 of the cam plate 481,and the pusher 46 of the head portion 45 descends.

When the pusher 46 comes into contact with the base portion 44, as shownin FIG. 18, a sealed space 431 including a concave portion 441 is formedbetween the pusher 46 and the base portion 44. In this state, the sensor90 is pressed against the socket 445 by the convex portion 461 of thepusher 46, and is electrically connected to the socket 445.

Next, the sensor 90 is tested. Specifically, first, the temperature ofthe sensor 90 is adjusted to a predetermined value by supplying arefrigerant and a hot medium from the temperature adjustment unit 37 tothe heat sinks 443 and 462 of the base portion 44 and the head portion45. Next, the pressure adjustment unit 36 adjusts the pressure of theatmosphere in the sealed space 431 to a predetermined value, therebyapplying a predetermined value of pressure to the sensor 90. Then, in astate in which the temperature of the sensor 90 is maintained at apredetermined temperature and a predetermined pressure is applied to thesensor 90, the test unit 35 acquires an electric signal output from thesensor 90 via the socket 445, and judges the quality of the sensor 90.

FIG. 19 is a block diagram showing a control system of the sensor testsystem in the present embodiment.

Each of the test cells 30A to 30D included in the test apparatus group20 includes the control system described above with reference to FIG.13. That is, as shown in FIG. 19, the test cells 30A to 30D have controlunits 34A to 34D respectively. As described above, the loader 10 and theunloader 80 have the control units 15 and 85 respectively, and themoving devices 70 also have the control units 75 respectively.

In the present embodiment, all of the control units 15, 34A to 34D, 75,and 85 are communicably connected in the sensor test system 1. Thecontrol unit 34D of the test cell 30D at the rear end collectivelymanages the controls in the sensor test system 1. Specifically, thecontrol unit 34D of the test cell 30D controls the remaining controlunits 15, 34A to 34C, 75, 85, and the remaining control units 15, 34A to34C, 75, 85 are configured to operate in accordance with instructions ofthe control unit 34D of the test cell 30D.

That is, in the present embodiment, a so-called master/slave system isemployed in which the control unit 34D of the test cell 30D correspondsto a “master” and the other control units 15, 34A to 34C, 75, 85correspond to a “slave”. This eliminates the need for a dedicatedcontrol device for collectively managing the controls in the sensor testsystem, thereby reducing the cost of the system. The control unit of themaster that collectively manages the controls in the sensor test system1 may be any of the control units 34A to 34C of the test units 30A to30C instead of the control unit 34D of the test cell 30D.

Returning to FIG. 1, in the sensor test system 1 of the presentembodiment, when the sensor 90 is carried from the loader 10 into thetest cell group 20, the first test is performed in the first test cell30A. The first test is, for example, a low pressure test under a lowtemperature environment. When the test in the test cell 30A iscompleted, the sensor 90 is conveyed to the next test cell 30B by themoving device 70.

The second test is performed in the test cell 30B. The second test is atest under different conditions from the first test, for example, ahigh-pressure test under a low temperature environment. When the test inthe test cell 30B is completed, the sensor 90 is conveyed to the nexttest cell 30C by the moving device 70.

A third test is performed in the test cell 30C. The third test is a testunder different conditions from the first and second tests, for example,a low pressure test under a high temperature environment. Although notparticularly limited, the third test is a test in which the sensor 90 istested in a state in which the temperature of the sensor 90 is higherthan that of the first test. When the test in the test cell 30C iscompleted, the sensor 90 is conveyed to the final test cell 30D by themoving device 70.

A fourth test is performed in the test cell 30D. The fourth test is atest under different conditions from the first to third tests, forexample, a high-pressure test under a high-temperature environment.Although not particularly limited, the fourth test is a test in whichthe sensor 90 is tested in a state in which the temperature of thesensor 90 is higher than that of the second test. When the test in thetest cell 30D is completed, the sensor 90 is discharged from the testcell group 20 by the unloader 80.

In this manner, by sequentially performing the test of the sensors 90 bythe test cells 30A to 30D, it is possible to execute a plurality oftypes (four types in this example) of tests, for one sensor 90. Thecontent of the first to fourth tests is not particularly limited to theabove.

As described above, in the present embodiment, the sensor test system 1includes a plurality of sensor test apparatuses 30A to 30D, and thesensor test apparatuses 30A to 30D are coupled (connected) to each otherso that the sensor 90 can be transferred. Therefore, a plurality ofconditions can be efficiently tested for the same sensor 90, so that thesensor test system 1 having excellent throughput can be provided.

As described above, the test object of the sensor test system 1 may be asensor other than a pressure sensor, and in this case, it is necessaryto change the application unit of each test cell 30. For example, whenthe test object of the sensor test system 1 is a differential pressuresensor, an application unit having an application device shown in FIG.20 is used. When the test object of the sensor test system 1 is amagnetic sensor, an application unit having an application device shownin FIG. 21 is used.

FIG. 20 is a diagram showing a first modification of the applicationdevice in the present embodiment, and is a cross-sectional view of anapplication device for a differential pressure sensor.

As shown in FIG. 20, the differential pressure sensor 91 has twopressure application port 911 and 912. The differential pressure sensor91 detects a first pressure through a first pressure application port911 and detects a second pressure through a second pressure applicationport 912. The first pressure and the second pressure are pressure valuesdifferent from each other, and the differential pressure sensor 91calculates a difference between the first pressure and the secondpressure, and outputs an electric signal according to the calculationresult.

When the test object of the sensor test system 1 is the differentialpressure sensor 91, an application unit in which the application device42 is replaced with the application device 52 shown in FIG. 20 is usedas the application unit for the differential pressure sensor. Thisapplication unit has the same configuration as the above describedapplication unit 40 except that the application device 42 is replacedwith the application device 52.

As shown in FIG. 20, the differential pressure sensor application device52 includes a base portion 54, a head portion 55, and a pressingmechanism (not shown). The pressing mechanism has the same configurationas the pressing mechanism 48 described above.

The base portion 54 is fixed to the bottom surface of the housing of thedry chamber so as to face the window of the lid of the dry chamber. Asocket 541 is provided on the upper surface of the base portion 54. Thesocket 541 has the same configuration as the socket 445 described above,and is electrically connected to the test unit 35.

A heat sink 542 is formed inside the base portion 54. The heat sink 542has the same configuration as the heat sink 443 described above, and isconnected to the temperature adjustment unit 37. The heat sink 542 isprovided directly below the socket 541, and can heat/cool the sensor 91through the socket 541.

The head portion 55 includes a pusher 56, a first pressure nozzle 57, asecond pressure nozzle 58, and a holding plate (not shown). The holdingplate has the same configuration as the holding plate 47 describedabove, and movably holds the pusher 56 via a stopper and a coil spring,and is movable in the Y direction by an actuator.

The first and second pressure nozzles 57 and 58 pass through the pusher56 and are exposed at the tip of the pusher 56. An O-ring 571 isattached to the tip of the first pressure nozzle 57, and an O-ring 581is also attached to the tip of the second pressure nozzle 58. The firstpressure nozzle 57 is connected to the first pressure adjustment unit36A, and the second pressure nozzle 58 is connected to the secondpressure adjustment unit 36B. The test cell including the applicationdevice 52 for the differential pressure sensor includes two pressureadjustment units 36A and 36B instead of the pressure adjustment unit 36,and the first and second pressure adjustment units 36A and 36B have thesame configuration as that of the pressure adjustment unit 36 describedabove, respectively. Different pressures are supplied from the first andsecond pressure adjustment units 36A and 36B.

Since the first and second pressure nozzles 57 and 58 are exposed at thecenter of the distal end surface of the pusher 56, the outer peripheralportion of the distal end surface of the pusher 56 contacts the sensor91. A heat sink 561 is provided inside the pusher 56. The heat sink 561has the same configuration as the heat sink 462 described above, and isconnected to the temperature adjustment unit 37. Although not shown inparticular, the pusher 56 has a cam follower (not shown) having the sameconfiguration as the cam follower 464 described above.

The test using the application unit including the application device 52is performed as follows. That is, when the sensor 91 is placed on thesocket 541, the head portion 55 moves horizontally above the sensor 91.Next, the head portion 55 is lowered by the horizontal movement of thepressing mechanism, thereby the sensor 91 is pressed against the socket541 by the pusher 56, and the sensor 91 and the socket 541 areelectrically connected to each other. At the same time, the firstpressure nozzle 57 is connected to the first pressure application port911 of the sensor 91, and the second pressure nozzle 58 is connected tothe second pressure application port 912 of the sensor 91.

The sensor 91 is then tested. Specifically, first, the temperature ofthe sensor 91 is adjusted to a predetermined value by supplying arefrigerant and a hot medium from the temperature adjustment unit 37 tothe heat sinks 542 and 561 of the base portion 54 and the head portion55. Next, a first pressure is applied to the first pressure applicationport 911 of the sensor 91 by the first pressure adjustment unit 36A, anda second pressure is applied to the second pressure application port 912of the sensor 91 by the second pressure adjustment unit 36B. Then, thetest unit 35 executes the test of the sensor 91 through the socket 541while maintaining the temperature of the sensor 91 and applying thefirst and second pressures to the sensor 91.

The first and second pressure nozzles 57 and 58 in the presentembodiment correspond to an example of the “differential pressureapplication part” in the present invention, and the heat sinks 542 and561 in the present embodiment correspond to an example of the“temperature adjustment part” in the present invention.

FIG. 21 is a diagram showing a second modification of the applicationdevice in the present embodiment, and is a cross-sectional view of anapplication device for a magnetic sensor.

The magnetic sensor 92 detects the magnitude of the magnetic fieldapplied to the magnetic sensor 92, and outputs an electric signalaccording to the detection result. The use application of the magneticsensor 92 is not particularly limited, and is, for example, a currentsensor.

When the test object of the sensor test system 1 is the magnetic sensor92, an application unit in which the application device 42 is replacedwith the application device 62 shown in FIG. 21 is used as theapplication unit for the magnetic sensor. This application unit has thesame configuration as the described above application unit 40 exceptthat the application device 42 is replaced with the application device62.

As shown in FIG. 21, the application device 62 for a magnetic sensorincludes a base portion 64, a head portion 65, a pair of electromagnets67, and a pressing mechanism (not shown). The pressing mechanism has thesame configuration as the pressing mechanism 48 described above.

The base portion 64 is fixed to the bottom surface of the housing of thedry chamber so as to face the window of the lid of the dry chamber. Asocket 641 is provided on the upper surface of the base portion 64. Thesocket 641 has the same configuration as the socket 445 described above,and is electrically connected to the test unit 35.

A heat sink 642 is formed inside the base portion 64. The heat sink 642has the same configuration as the heat sink 443 described above, and isconnected to the temperature adjustment unit 37. The heat sink 642 isprovided directly below the socket 641, and can heat/cool the magneticsensor 92 through the socket 641.

The head portion 65 includes a pusher 66 and a holding plate (not shown)for holding the pusher 66. The holding plate has the same configurationas the holding plate 47 described above, and movably holds the pusher 66via a stopper and a coil spring, and is movable in the Y direction by anactuator.

A heat sink 661 is provided inside the pusher 66. The heat sink 661 hasthe same configuration as the heat sink 462 described above, and isconnected to the temperature adjustment unit 37. Although not shown inparticular, the pusher 66 has a cam follower (not shown) having the sameconfiguration as the cam follower 464 described above.

The pair of electromagnets 67 are disposed opposite to each other so asto sandwich the sensor 92 being on the socket 641. Each electromagnet 67has a core 671 and a coil 675.

The core 671 is a ferrite (iron core) for increasing the magnetic fluxgenerated in the coil 675 and allowing a closed loop (magnetic circuit)formed by the magnetic flux to pass through the magnetic sensor 92. Thecore 671 has a main body 672, a first protrusion 673, and a secondprotrusion 674. The main body portion 672 is a columnar portionextending along the normal direction (Z direction) of the main surfaceof the socket 641, and the coil 675 is wound around the main bodyportion 672. The first projecting portion 673 projects from the upperend of the main body portion 672 toward the first projecting portion 673of the other electromagnet 67. The magnetic sensor 92 connected to thesocket 641 is interposed between the pair of first protrusions 673. Thesecond projecting portion 674 also projects from the lower end of themain body portion 672 toward the second projecting portion 674 of theother electromagnet 67, and the pair of second projecting portions 674face each other.

The coil 675 is a conductive wire wound around the main body 672 of thecore 671, and is connected to the magnetic field adjustment unit 38. Thetest cell including the application device 62 for the magnetic sensorincludes a magnetic field adjustment unit 38 instead of the pressureadjustment unit 36. When a current flows from the magnetic fieldadjustment unit 38 to the coil 675, a magnetic flux is generated, andthe magnetic flux forms a closed loop such as the main body 671 of onecore 671, the first protrusion 672 of one core 671, the magnetic sensor92, the first protrusion 672 of the other core 671, the main body 671 ofthe other core 671, the second protrusion 673 of the other core 671, andthe second protrusion 672 of the one core 671.

The test using the application unit including the application device 62is performed as follows. That is, when the sensor 92 is placed on thesocket 641, the head portion 65 moves above the sensor 92. Next, thehead portion 65 is lowered by the horizontal movement of the pressingmechanism, thereby the sensor 92 is pressed against the socket 641 bythe pusher 66, and the sensor 92 and the socket 641 are electricallyconnected to each other. At the same time, the sensor 92 is positionedbetween the first protrusions 673 of the pair of cores 671 facing eachother.

The sensor 92 is then tested. Specifically, first, the temperature ofthe sensor 92 is adjusted to a predetermined value by supplying arefrigerant and a hot medium from the temperature adjustment unit 37 tothe heat sinks 642 and 661 of the base portion 64 and the head portion65. Next, a magnetic field of a predetermined strength is applied to thesensor 92 by the magnetic adjustment unit 38. Then, the test unit 35executes the test of the sensor 92 through the socket 641 whilemaintaining the temperature of the sensor 92 and applying a magneticfield to the sensor 92.

The pair of electromagnetic 67 in the present embodiment corresponds toan example of the “magnetic field application part” in the presentinvention, heat sinks 642 and 661 in the present embodiment correspondsto an example of the “temperature adjustment part” in the presentinvention.

Embodiments heretofore explained are described to facilitateunderstanding of the present invention and are not described to limitthe present invention. It is therefore intended that the elementsdisclosed in the above embodiments include all design changes andequivalents to fall within the technical scope of the present invention.

EXPLANATIONS OF LETTERS OR NUMERALS

-   -   1 . . . sensor test system    -   10 . . . loader    -   15 . . . control unit    -   20 . . . test cell group    -   30, 30A to 30D . . . test cell    -   301 . . . apparatus main body    -   307 a-307 c . . . opening    -   40 . . . application unit    -   42 . . . application device    -   43 . . . pressure chamber    -   44 . . . base portion    -   443 . . . heat sink    -   445 . . . socket    -   46 . . . pusher    -   462 . . . heat sink    -   52 . . . application device    -   57 . . . first pressure nozzle    -   58 . . . second pressure nozzle    -   62 . . . application device    -   67 . . . electromagnet    -   33 . . . conveying robot    -   34,34 A to 34 D . . . control unit    -   35 . . . test unit    -   36 . . . pressure adjustment unit    -   37 . . . temperature adjustment unit    -   38 . . . The magnetic field adjustment unit    -   70 . . . moving device    -   75 . . . control unit    -   80 . . . unloader    -   85 . . . control unit    -   90, 90′ . . . pressures sensor    -   91 . . . differential pressure sensor    -   92 . . . magnetic sensor

1. A sensor test system which tests a sensor which detects a firstphysical quantity, the sensor test system comprising a test apparatusgroup including a plurality of sensor test apparatuses coupled to eachother so that the sensor can be transferred, each of the sensor testapparatuses comprising: an application unit comprising at least oneapplication device including a socket to which the sensor iselectrically connected, and a first application part which applies thefirst physical quantity to the sensor; a test unit which tests thesensor via the socket; and a first conveying device which conveys thesensor into and out of the application unit.
 2. The sensor test systemaccording to claim 1, wherein each of the sensor test apparatusescomprises an apparatus main body which houses the application unit, thetest unit and the first conveying device, the apparatus main body has afirst opening through which the sensor is supplied to a first positionin the sensor test apparatus, and a second opening through which thesensor is discharged from a second position in the sensor testapparatus, the sensor test apparatuses include first and second sensortest apparatuses adjacent to each other, and the second opening of thefirst sensor test apparatus and the first opening of the second sensortest apparatus face each other.
 3. The sensor test system according toclaim 2, wherein the test apparatus group includes a second conveyingdevice which moves from the second position of the first sensor testapparatus to the first position of the second sensor test apparatus, andthe second conveying device transfers the sensor from the first sensortest apparatus to the second sensor test apparatus through the secondopening of the first sensor test apparatus and the first opening of thesecond sensor test apparatus.
 4. The sensor test system of claim 1,wherein each of the sensor test apparatuses comprises a control unitwhich controls the application unit, the test unit and the firstconveying device, and the control unit of one of the sensor testapparatuses controls the control units of the remaining sensor testapparatuses.
 5. The sensor test system according to claim 1, wherein thesensor test system comprises: a supply device which supplies theuntested sensor to the test apparatus group, and a discharge devicewhich discharges the tested sensor from the test apparatus group.
 6. Thesensor test system according to claim 1, wherein the first applicationpart is a pressure application part which applies a pressure to thesensor.
 7. The sensor test system according to claim 1, wherein thefirst application part is a differential pressure application part whichapplies two kinds of pressures to the sensor.
 8. The sensor test systemaccording to claim 1, wherein the first application part is a magneticfield application part which applies a magnetic field to the sensor. 9.The sensor test system according to claim 1, wherein the applicationdevice includes a second application part which applies a secondphysical quantity different from the first physical quantity to thesensor, and the sensor test apparatuses include: a sensor test apparatuswhich applies the second physical quantity of a first value to thesensor; and a sensor test apparatus which applies the second physicalquantity of a second value different from the first value to the sensor.10. The sensor test system according to claim 9, wherein the secondapplication part is a temperature adjustment part which applies athermal stress to the sensor to adjust the temperature of the sensor.11. The sensor test system according to claim 10, wherein theapplication device includes a pusher which contacts the sensor andpresses the sensor against the socket, and the temperature adjustmentpart is disposed in the pusher.